QUALITY VARIATION OF ZNSE HETEROEPITAXIAL LAYERS CORRELATED WITH NONUNIFORMITY IN THE GAAS SUBSTRATE WAFER

被引:2
作者
MATSUMOTO, T
IIJIMA, T
ISHIDA, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 10期
关键词
D O I
10.1143/JJAP.27.L1942
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:L1942 / L1944
页数:3
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