PULSED LASER DEPOSITION OF STOICHIOMETRIC LINBO3 THIN-FILMS BY USING O2 AND AR GAS-MIXTURES AS AMBIENTS

被引：66

作者：

OGALE, SB

NAWATHEYDIKSHIT, R

DIKSHIT, SJ

KANETKAR, SM

机构：

[1] Center for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 11期

关键词：

D O I：

10.1063/1.350509

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Stoichiometric thin films of LiNbO3 have been deposited on (100) silicon by a pulsed excimer laser deposition technique. By studying several cases of depositions in vacuum, oxygen, and argon, as well as oxygen-argon mixture as ambients, it is brought out that the desired stoichiometry in the film can be attained only by having an appropriate oxygen-argon mixture during deposition. The films have been characterized by x-ray diffraction, infrared transmission, and spectroscopic ellipsometry techniques.

引用

页码：5718 / 5720

页数：3

共 15 条

[1] LIQUID-PHASE EPITAXIAL-GROWTH OF LINBO3 THIN-FILMS [J].

BAUDRANT, A ;

VIAL, H ;

DAVAL, J .

JOURNAL OF CRYSTAL GROWTH, 1978, 43 (02) :197-203

[2] INFLUENCE OF THE BEAM SPOT SIZE ON ABLATION RATES IN PULSED-LASER PROCESSING [J].

EYETT, M ;

BAUERLE, D .

APPLIED PHYSICS LETTERS, 1987, 51 (24) :2054-2055

[3]

HEWING GH, 1988, THIN SOLID FILMS, V141, P251

[4] SURFACE ACOUSTIC-WAVE MICROSENSORS USING DIFFUSED SUBSTRATES [J].

HUANG, PH .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) :744-749

[5] PHASE-MATCHED 2ND-HARMONIC GENERATION AT 440-NM IN A LINBO3-GD3GA5O12 WAVE-GUIDE WITH A TUNABLE STIMULATED RAMAN SOURCE [J].

JAIN, K ;

HEWIG, GH .

OPTICS COMMUNICATIONS, 1981, 36 (06) :483-486

[6] EPITAXIAL-GROWTH OF YBA2CU3O7-DELTA THIN-FILMS ON LINBO3 SUBSTRATES [J].

LEE, SG ;

KOREN, G ;

GUPTA, A ;

SEGMULLER, A ;

CHI, CC .

APPLIED PHYSICS LETTERS, 1989, 55 (12) :1261-1263

[7]

MCCLUNE WF, 1984, POWDER DIFFRACTION F, V20, P672

[8] GROWTH OF LINBO3 SINGLE-CRYSTAL FILM FOR OPTICAL WAVEGUIDES [J].

MIYAZAWA, S .

APPLIED PHYSICS LETTERS, 1973, 23 (04) :198-200

[9] 2ND HARMONIC-GENERATION IN A SPUTTERED LINBO3 FILM ON MGO [J].

NUNOMURA, K ;

ISHITANI, A ;

MATSUBARA, T ;

HAYASHI, I .

JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) :355-360

[10]

RAUBER A, 1978, CURRENT TOPICS MATER, P1

← 1 2 →