DOUBLE MODULATION-DOPED ALGAAS/INGAAS HETEROSTRUCTURE WITH A GRADED COMPOSITION IN THE QUANTUM-WELL

被引:12
作者
YOO, TK [1 ]
MANDEVILLE, P [1 ]
PARK, H [1 ]
SCHAFF, WJ [1 ]
EASTMAN, LF [1 ]
机构
[1] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853
关键词
D O I
10.1063/1.108370
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new double modulation-doped AlGaAs/InGaAs heterostructure with a graded composition in the InGaAs quantum well (QW) has been designed and electrically characterized. An InGaAs QW with a rectangular-like potential profile in the presence of the two dimensional electron gas is obtained by a two-step grading of the In composition, which results in a broad and symmetric electron distribution profile even under various voltages. The Hall measurement shows a very high electron mobility of 7230 cm2/V s and an electron sheet density of 4.1 X 10(12)/cm2 at room temperature. To our knowledge, this is the highest mobility ever reported so far for the double modulation-doped Al0.3Ga0.7As/In0.2Ga0.8As field-effect transistor structure.
引用
收藏
页码:1942 / 1944
页数:3
相关论文
共 17 条
[1]  
BROWN AS, 1991, APPL PHYS LETT, V57, P3610
[2]   INFLUENCE OF THE DELTA DOPING POSITION IN THE CHANNEL ON THE DEVICE PERFORMANCE OF ALGAAS INGAAS MODULATION-DOPED FIELD-EFFECT TRANSISTORS [J].
DICKMANN, J .
APPLIED PHYSICS LETTERS, 1992, 60 (01) :88-90
[3]  
FOISY MC, 1990, THESIS CORNELL U
[4]   CURRENT-GAIN CUTOFF FREQUENCY COMPARISON OF INGAAS HEMTS [J].
HIKOSAKA, K ;
SASA, S ;
HARADA, N ;
KURODA, S .
IEEE ELECTRON DEVICE LETTERS, 1988, 9 (05) :241-243
[5]  
HONG WP, 1986, IEEE ELECTR DEVICE L, V7, P480, DOI 10.1109/EDL.1986.26446
[6]  
HUESCHEN M, 1987, IEDM, P596
[7]  
Inoue K., 1987, IEDM, P422
[8]   VERY HIGH POWER-ADDED EFFICIENCY AND LOW-NOISE 0.15-MICRO-M GATE-LENGTH PSEUDOMORPHIC HEMTS [J].
KAO, MY ;
SMITH, PM ;
HO, P ;
CHAO, PC ;
DUH, KHG ;
JABRA, AA ;
BALLINGALL, JM .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (12) :580-582
[9]  
Kim B., 1988, International Electron Devices Meeting. Technical Digest (IEEE Cat. No.88CH2528-8), P168, DOI 10.1109/IEDM.1988.32781
[10]   LOW FIELD TRANSPORT-PROPERTIES OF TWO-DIMENSIONAL ELECTRON-GAS IN SELECTIVELY DOPED N-ALGAAS/GAINAS/GAAS PSEUDOMORPHIC STRUCTURES [J].
LUO, JK ;
OHNO, H ;
MATSUZAKI, K ;
HASEGAWA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1988, 27 (10) :1831-1840