SENSING MECHANISM IN TIN OXIDE-BASED THICK-FILM GAS SENSORS

被引:67
作者
SRIVASTAVA, RK [1 ]
LAL, P [1 ]
DWIVEDI, R [1 ]
SRIVASTAVA, SK [1 ]
机构
[1] BANARAS HINDU UNIV,CTR MICROELECTR RES,INST TECHNOL,DEPT ELECTR ENGN,VARANASI 221005,UTTAR PRADESH,INDIA
关键词
THICK-FILM GAS SENSORS; TIN OXIDE GAS SENSORS;
D O I
10.1016/0925-4005(94)01248-2
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A model has been developed for the sensing mechanism of metal oxide-based thick-film gas sensors. The model explains the behaviour of the sensor conductance as a function of the concentration of test gas and the operating temperature of the sensor. Using the Schottky-barrier conduction mechanism through grain boundaries, a relationship between the degree of surface coverage theta and the conductance G has been obtained. To relate the conductance with the concentration of the gas, the Freundlich adsorption isotherm for gases and vapours on a solid surface has been used. The isotherm relates the degree of surface coverage theta with the partial pressure of the gas (concentration). By eliminating theta, an expression relating the variation of G with concentration has been obtained. To study the validity of the model, a thick-film Pd-doped tin oxide gas sensor has been fabricated and tested with propanol (C3H7OH). The variation in the conductance with changes in concentration and temperature has been observed. The observed data show an excellent fit with the developed model. Using the experimental data, the constants of the theoretical equation have also been evaluated.
引用
收藏
页码:213 / 218
页数:6
相关论文
共 24 条
[1]  
Adamson A.W., 1967, PHYSICAL CHEM SURFAC
[2]   CH4 THICK-FILM GAS SENSORS - CHARACTERIZATION METHOD AND THEORETICAL EXPLANATION [J].
CAROTTA, MC ;
DALLARA, C ;
MARTINELLI, G ;
PASSARI, L ;
CAMANZI, A .
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (03) :191-196
[3]  
CLIFFORD PK, 1983, P INT M CHEM SENSORS, P135
[4]  
ERTL G, 1982, CHEM PHYSICS SOLID S, V3
[5]   ELECTRICAL-CONDUCTION IN SOLID-STATE GAS SENSORS [J].
GARDNER, JW .
SENSORS AND ACTUATORS, 1989, 18 (3-4) :373-387
[6]   A NONLINEAR DIFFUSION-REACTION MODEL OF ELECTRICAL-CONDUCTION IN SEMICONDUCTOR GAS SENSORS [J].
GARDNER, JW .
SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) :166-170
[7]   ELECTRON THEORY OF THIN-FILM GAS SENSORS [J].
GEISTLINGER, H .
SENSORS AND ACTUATORS B-CHEMICAL, 1993, 17 (01) :47-60
[8]  
GEISTLINGER H, 1993, SENSOR ACTUAT B-CHEM, V13, P685
[9]   SOME UNIQUE ASPECTS ON THO2-DOPED SNO2 EXPOSED TO H-2 GAS [J].
KANEFUSA, S ;
NITTA, M ;
HARADOME, M .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (02) :1145-1146
[10]   SMELL IDENTIFICATION USING A THICK-FILM HYBRID GAS SENSOR [J].
KANEYASU, M ;
IKEGAMI, A ;
ARIMA, H ;
IWANAGA, S .
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1987, 10 (02) :267-273