INSITU MASS-SPECTROSCOPY STUDIES OF THE DECOMPOSITION OF ORGANOMETALLIC ARSENIC COMPOUNDS IN THE PRESENCE OF GA(CH3)3 AND GA(C2H5)3

被引：87

作者：

LEE, PW ^{[1
]}

OMSTEAD, TR ^{[1
]}

MCKENNA, DR ^{[1
]}

JENSEN, KF ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 93卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(88)90518-0

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：134 / 142

页数：9

相关论文

共 23 条

[1] Bailar J.C., 1982, COMPREHENSIVE INORGA
[2] TRANSITION-METAL - CARBON SIGMA-BOND SCISSION
BAIRD, MC
[J]. JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1974, 64 (03) : 289 - 300
[3] GROWTH OF HIGH-QUALITY GAAS USING TRIMETHYLGALLIUM AND DIETHYLARSINE
BHAT, R
KOZA, MA
SKROMME, BJ
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (17) : 1194 - 1196
[4] USE OF TERTIARYBUTYLARSINE FOR GAAS GROWTH
CHEN, CH
LARSEN, CA
STRINGFELLOW, GB
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (04) : 218 - 220
[5] CORNU A, 1966, COMPILATIONS MASS S
[6] METAL SIGMA-HYDROCARBYLS, MR NORMAL-STOICHIOMETRY, STRUCTURES, STABILITIES, AND THERMAL-DECOMPOSITION PATHWAYS
DAVIDSON, PJ
LAPPERT, MF
PEARCE, R
[J]. CHEMICAL REVIEWS, 1976, 76 (02) : 219 - 242
[7] Kondratiev VN, 1972, RATE CONSTANTS GAS P
[8] Kuech T. F., 1987, Material Science Reports, V2, P1, DOI 10.1016/0920-2307(87)90002-8
[9] OMVPE GROWTH OF GAINAS
KUO, CP
COHEN, RM
STRINGFELLOW, GB
[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 64 (03) : 461 - 470
[10] REACTION-MECHANISMS IN THE ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH OF GAAS
LARSEN, CA
BUCHAN, NI
STRINGFELLOW, GB
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (06) : 480 - 482