OMVPE GROWTH OF GAINAS

被引:59
作者
KUO, CP
COHEN, RM
STRINGFELLOW, GB
机构
关键词
D O I
10.1016/0022-0248(83)90329-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
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页码:461 / 470
页数:10
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  • [1] BALIGA BJ, 1976, J ELECTROCHEM SOC, V122, P684
  • [2] THE USE OF A METALORGANIC COMPOUND FOR THE GROWTH OF INP-EPITAXIAL LAYERS
    BENZ, KW
    RENZ, H
    WEIDLEIN, J
    PILKUHN, MH
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1981, 10 (01) : 185 - 192
  • [3] BHAT R, 1982, P SOC PHOTO-OPT INST, V323, P104, DOI 10.1117/12.934283
  • [4] BROWN AS, 1983, ELECTRONIC MATERIALS
  • [5] A SIMPLIFIED TECHNIQUE FOR MOCVD OF III-V-COMPOUNDS
    CHATTERJEE, AK
    FAKTOR, MM
    MOSS, RH
    WHITE, EAD
    [J]. JOURNAL DE PHYSIQUE, 1982, 43 (NC-5): : 491 - 503
  • [6] ORGANOMETALLIC VPE GROWTH OF GAAS1-YSBY USING TRIMETHYL ANTIMONY AND GA1-XINXAS USING TRIMETHYL ARSENIC
    COOPER, CB
    LUDOWISE, MJ
    AEBI, V
    MOON, RL
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1980, 9 (02) : 299 - 309
  • [7] HIGH-PURITY GAAS PREPARED FROM TRIMETHYLGALLIUM AND ARSINE
    DAPKUS, PD
    MANASEVIT, HM
    HESS, KL
    LOW, TS
    STILLMAN, GE
    [J]. JOURNAL OF CRYSTAL GROWTH, 1981, 55 (01) : 10 - 23
  • [8] Duchemin J.-P., 1981, INST PHYS CONF SE, V63, P89
  • [9] GAINAS AND GAINASP MATERIALS GROWN BY LOW-PRESSURE MOCVD FOR MICROWAVE AND OPTOELECTRONIC APPLICATIONS
    DUCHEMIN, JP
    HIRTZ, JP
    RAZEGHI, M
    BONNET, M
    HERSEE, SD
    [J]. JOURNAL OF CRYSTAL GROWTH, 1981, 55 (01) : 64 - 73
  • [10] FUKUI T, 1975, JAPAN J APPL PHYS, V18, P2157