PHYSICAL DEGRADATION OF A-SI FILMS ON THERMAL-TREATMENT - A SCANNING ELECTRON-MICROSCOPE STUDY

被引：9

作者：

JOHN, P

ODEH, IM

THOMAS, MJK

TRICKER, MJ

WILSON, JIB

DHARIWAL, RS

机构：

[1] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH EH1 1HX,MIDLOTHIAN,SCOTLAND

[2] HERIOT WATT UNIV,DEPT ELECT & ELECTR ENGN,EDINBURGH EH1 1HX,MIDLOTHIAN,SCOTLAND

来源：

JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 05期

关键词：

D O I：

10.1007/BF01033846

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1305 / 1309

页数：5

共 12 条

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[5] STUDIES OF THE MECHANISM OF THE DECOMPOSITION OF HYDROGENATED A-SI FILMS [J].

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ODEH, IM ;

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