NOVEL ANALYSIS SYSTEM OF IMAGING-PLATE PLANE-WAVE X-RAY TOPOGRAPHY FOR CHARACTERIZING LATTICE DISTORTION IN SILICON

被引：7

作者：

KUDO, Y ^{[1
]}

KOJIMA, S ^{[1
]}

LIU, KY ^{[1
]}

KAWADO, S ^{[1
]}

ISHIKAWA, T ^{[1
]}

机构：

[1] UNIV TOKYO,DEPT ENGN,BUNKYO KU,TOKYO 113,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1994年 / 33卷 / 6B期

关键词：

PLANE-WAVE X-RAY TOPOGRAPHY; SYNCHROTRON RADIATION; IMAGING PLATE; LOCAL LATTICE DISTORTION; ANALYSIS SYSTEM;

D O I：

10.1143/JJAP.33.L823

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter reports that a novel analysis system has been developed to determine lattice distortion in silicon single crystals from plane-wave X-ray topographs taken using synchrotron radiation. The system analyzes the topographs recorded on the imaging plate and gives the distortion as local variations in spacing and orientation of the lattice plane. Line analysis and mapping of the distortion in any position on the topograph can be easily performed in the system due to the overall digitization by the imaging plate.

引用

页码：L823 / L825

页数：3

共 12 条

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