MOLECULAR-BEAM EPITAXY GROWTH OF INAS-ALSB-GASB INTERBAND TUNNELING DIODES

被引:6
作者
CHEN, JF [1 ]
CHO, AY [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
INAS-ALSB-GASB TUNNEL DIODES; NEGATIVE RESISTANCE; SEMICONDUCTOR DEVICES AND MATERIALS;
D O I
10.1007/BF02661375
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents our studies of the growth of InAs/GaAs and GaSb/GaAs heterojunctions by molecular beam epitaxy and their applications in fabricating the InAs-AlSb-GaSb interband tunneling devices. The Hall effect and x-ray diffraction were used to determine the optimum growth conditions for the layers. In addition, the qualities of the InAs and GaSb epilayers, grown under their optimum conditions, were compared. The full width at half maximum (FWHM) from the x-ray diffraction for a GaSb epilayer is about 50 arcsec narrower than an InAs epilayer of the same thickness. The narrower FWHM and excellent surface morphology of the GaSb layer have led us to grow the polytype heterostructure on a p+-GaAs substrate using a p+-GaSb as the buffer layer. The polytype tunneling structures grown on GaAs substrates under these conditions show good negative differential resistance properties. Five different interband tunneling structures are compared and discussed in terms of their peak-current densities and peak-to-valley current ratios.
引用
收藏
页码:259 / 265
页数:7
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