共 10 条
- [3] HASIMOTO S, 1991, APPL SURF SCI, V47, P323
- [5] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .1. ION-SOURCE TECHNOLOGY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 725 - 736
- [6] MAISSEL G, 1970, HDB THIN FILM TECHNO
- [7] MCCLURE DJ, 1986, P ANN TECHN C SOC VA, V29, P168
- [8] MITTAL KL, 1990, METALLIZED PLASTICS, V1
- [10] SACHER E, 1990, ACS S SERIES, V440