CHEMICAL VAPOR-DEPOSITION OF BORON AND BORON-NITRIDE FROM DECABORANE(14)

被引：28

作者：

KIM, YG

DOWBEN, PA

SPENCER, JT

RAMSEYER, GO

机构：

[1] GE,ELECTR LAB,SYRACUSE,NY 13221

[2] SYRACUSE UNIV,DEPT CHEM,SYRACUSE,NY 13244

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.576181

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2796 / 2798

页数：3

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[3]

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[4] OPTICAL PROPERTIES OF THIN BORON NITRIDE FILMS [J].

BARONIAN, W .

[5]

Basche M., 1964, U.S. Pat., Patent No. [3, 152, 006, 3152006]

[6]

BEALE HA, 1983, Patent No. 4415420

[7]

BEALE HA, 1987, Patent No. 4655893

[8]

BEALE HA, 1981, Patent No. 429738

[9]

BEALE HA, 1981, Patent No. 4297387

[10]

BEALE HA, 1983, Patent No. 4412899