The growth of SrCuO(x) thin layer and Bi2Sr2Can-1CunO2n+4 on SrTiO3 (100) substrate has been studied. When Sr and Cu are supplied simultaneously to the substrates to form SrCuO(x), either a SrO or CuO2 layer can form the surface layer depending upon the composition of the substrate surface. By the successive supply of the subunit-cell layers of Bi2Sr2Can-1CunO2n+4, the structures with n = 1 to 5 are formed. The reflection high energy electron diffraction pattern shows streaks all through the growth, indicating two-dimensional layer growth in all the steps controlled within the monolayer accuracy.