REACTION OF ATOMIC FLUORINE WITH SILICON - THE GAS-PHASE PRODUCTS

[1] ANDERSON JB, 1974, MOL BEAMS LOW DENSIT

[2] BEENAKKER CIM, 1980, 157TH M EL SOC ST LO, V80, P330

[3] ION-SURFACE INTERACTIONS IN PLASMA ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3532 - 3540

[4] STUDIES OF CHEMI-LUMINESCENCE ACCOMPANYING FLUORINE ATOM ETCHING OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) : 5273 - 5276

[5] MASS-SPECTROMETRIC STUDIES AT HIGH TEMPERATURES .2. DISSOCIATION ENERGIES OF MONOFLUORIDES + DIFLUORIDES OF SILICON + GERMANIUM [J]. JOURNAL OF CHEMICAL PHYSICS, 1964, 41 (04) : 1066 - &

[6] THE REACTION OF FLUORINE-ATOMS WITH SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3633 - 3639

[7] Harland P. W., 1972, INT J MASS SPECTROM, V10, P169, DOI [10.1016/0020-7381[72]83007-9, DOI 10.1016/0020-7381172)83007-9]

[8] TOTAL CROSS SECTIONS FOR IONIZATION BY ELECTRON IMPACT [J]. CANADIAN JOURNAL OF CHEMISTRY, 1966, 44 (16): : 1967 - &

[9] IONIZATION CROSS SECTIONS OF ELEMENTS CALCULATED FROM MEAN-SQUARE RADII OF ATOMIC ORBITALS [J]. JOURNAL OF CHEMICAL PHYSICS, 1967, 46 (05) : 1646 - &

[10] MCDONALD JD, 1968, ADV CHEM SER, V72, P261

[1] ANDERSON JB, 1974, MOL BEAMS LOW DENSIT

[2] BEENAKKER CIM, 1980, 157TH M EL SOC ST LO, V80, P330

[3] ION-SURFACE INTERACTIONS IN PLASMA ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3532 - 3540

[4] STUDIES OF CHEMI-LUMINESCENCE ACCOMPANYING FLUORINE ATOM ETCHING OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) : 5273 - 5276

[5] MASS-SPECTROMETRIC STUDIES AT HIGH TEMPERATURES .2. DISSOCIATION ENERGIES OF MONOFLUORIDES + DIFLUORIDES OF SILICON + GERMANIUM [J]. JOURNAL OF CHEMICAL PHYSICS, 1964, 41 (04) : 1066 - &

[6] THE REACTION OF FLUORINE-ATOMS WITH SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3633 - 3639

[7] Harland P. W., 1972, INT J MASS SPECTROM, V10, P169, DOI [10.1016/0020-7381[72]83007-9, DOI 10.1016/0020-7381172)83007-9]

[8] TOTAL CROSS SECTIONS FOR IONIZATION BY ELECTRON IMPACT [J]. CANADIAN JOURNAL OF CHEMISTRY, 1966, 44 (16): : 1967 - &

[9] IONIZATION CROSS SECTIONS OF ELEMENTS CALCULATED FROM MEAN-SQUARE RADII OF ATOMIC ORBITALS [J]. JOURNAL OF CHEMICAL PHYSICS, 1967, 46 (05) : 1646 - &

[10] MCDONALD JD, 1968, ADV CHEM SER, V72, P261