DUAL QUARTZ-CRYSTAL MICROBALANCE

被引:39
作者
DUNHAM, GC [1 ]
BENSON, NH [1 ]
PETELENZ, D [1 ]
JANATA, J [1 ]
机构
[1] PACIFIC NW LAB, ENVIRONM MOLEC SCI LAB, RICHLAND, WA 99352 USA
关键词
D O I
10.1021/ac00098a005
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Construction and performance of a dual quartz crystal microbalance is described. The final probe has a dipstick configuration that is particularly suitable for sensing and monitoring applications in viscous and/or conducting liquids. The differential (heterodyned) frequency measurement substantially eliminates the deleterious effects of viscosity, temperature, and conductivity. The corresponding performance coefficients are temperature df/dT = 1.5 Hz/degrees C, viscosity df/d eta(L) = 103 Hz/cP, and conductivity df/dM = 108 Hz/M, where conductivity is expressed in terms of molarity of sodium chloride. As an example, the etching of a 2000-Angstrom-thick layer of aluminum has been monitored as a function of time.
引用
收藏
页码:267 / 272
页数:6
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