ESTABLISHING A FLATNESS STANDARD

被引：39

作者：

ELSSNER, KE ^{[1
]}

VOGEL, A ^{[1
]}

GRZANNA, J ^{[1
]}

SCHULZ, G ^{[1
]}

机构：

[1] CENT INST OPT & SPECT, W-1199 BERLIN, GERMANY

来源：

APPLIED OPTICS | 1994年 / 33卷 / 13期

关键词：

ABSOLUTE FLATNESS TESTING;

D O I：

10.1364/AO.33.002437

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A further-developed three-plate rotation method [Appl. Opt. 31, 3767 (1992)] for the absolute testing of flats is used as a measuring method for establishing flatness standards. A special phase-stepping Fizeau interferometer was built that permits flats of diameters up to 200 mm to be tested. First results show a mean error between 0.002 and 0.003 lambda in the determination of the absolute flatness deviations (lambda = 632.8 nm). These deviations are obtained at 500-600 points on each plate. A number of experimental conditions connected with the thermal and mechanical stability of the plates must be fulfilled.

引用

页码：2437 / 2446

页数：10

共 25 条

[1]

BEUCHEL H, 1985, FEINGERATETECHNIK, V34, P54

[2]

CREATH K, 1988, PROGR OPTICS, V26, P348

[3] MEASUREMENT OF OPTICAL FLATNESS [J].