ELEVATED ION CHARGE STATES IN VACUUM ARE PLASMAS IN A MAGNETIC-FIELD

被引:79
作者
OKS, EM
BROWN, IG
DICKINSON, MR
MACGILL, RA
EMIG, H
SPADTKE, P
WOLF, BH
机构
[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
[2] GESELL SCHWERIONENFORSCH MBH,D-64220 DARMSTADT,GERMANY
关键词
D O I
10.1063/1.114666
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on measurements of the charge state distributions of ions formed in a vacuum arc plasma in a magnetic field. A vacuum arc ion source was used for plasma formation and ion beam extraction, and the charge state spectra were investigated using both magnetic and time-of-flight charge state diagnostics. We find that the charge states of all of the metal species investigated are significantly increased by a magnetic field of up to 6 kG. New high ion charge states are created, and the mean of the charge state distribution is increased by about 30% at 3.75 kG and 50% at 6 kG. The results are important fundamentally as well as being of relevance to vacuum arc ion source applications such as ion implantation and accelerator injection.© 1995 American Institute of Physics.
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收藏
页码:200 / 202
页数:3
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