HARD TRANSITION-METAL NITRIDE FILMS DEPOSITED BY TRIODE ION PLATING

被引：11

作者：

KORHONEN, AS

MOLARIUS, JM

PENTTINEN, I

HARJU, E

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1988年 / 106卷

关键词：

D O I：

10.1016/0025-5416(88)90734-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：497 / 501

页数：5

共 13 条

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[2]

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[3]

Molarius J., 1987, THESIS HELSINKI U TE

[4] TI-N PHASES FORMED BY REACTIVE ION PLATING [J].

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KORHONEN, AS ;

RISTOLAINEN, EO .

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[5]

MOLARIUS JM, IN PRESS SURF COATIN

[6]

MUNZ WD, 1986, J VAC SCI TECHNOL A, V4, P2717, DOI 10.1116/1.573713

[7] COMPARISON OF WEAR CHARACTERISTICS AND PROPERTIES OF TIN-COATED GEAR CUTTING HOBS [J].

NIEMI, E ;

KORHONEN, AS ;

HARJU, E ;

KAUPPINEN, V .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2763-2767

[8]

PENTTINEN I, 1987, 34TH AM VAC SOC S AN

[9]

PYYPPONEN I, 1985, 480 TECHN RES CTR FI

[10]

RANDHAWA H, 1987, 34TH AM VAC SOC S AN

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