THE EMISSION OF NEUTRAL CLUSTERS IN SPUTTERING

被引：75

作者：

GNASER, H ^{[1
]}

HOFER, WO ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, PROJEKT KERNFUS, D-5170 JULICH 1, FED REP GER

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 03期

关键词：

D O I：

10.1007/BF00619396

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：261 / 271

页数：11

共 96 条

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