CHEMICAL VAPOR-DEPOSITION OF COPPER FROM COPPER (II) HEXAFLUOROACETYLACETONATE

被引：132

作者：

TEMPLE, D ^{[1
]}

REISMAN, A ^{[1
]}

机构：

[1] N CAROLINA STATE UNIV,DEPT ELECT & COMP ENGN,RALEIGH,NC 27695

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 11期

关键词：

D O I：

10.1149/1.2096498

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：3525 / 3529

页数：5

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