SURFACE STABILIZATION OF POLYCRYSTALLINE-SILICON FILMS DURING LASER RECRYSTALLIZATION

被引：26

作者：

KAMINS, TI

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 08期

关键词：

D O I：

10.1149/1.2127741

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：1824 / 1826

页数：3

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