SOFT-X-RAY FOUCAULT TEST - A PATH TO DIFFRACTION-LIMITED IMAGING

被引：13

作者：

RAYCHAUDHURI, AK ^{[1
]}

NG, W ^{[1
]}

LIANG, S ^{[1
]}

CERRINA, F ^{[1
]}

机构：

[1] UNIV WISCONSIN,CTR XRAY LITHOG,STOUGHTON,WI 53589

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1994年 / 347卷 / 1-3期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0168-9002(94)91911-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present the development of a soft X-ray Foucault test capable of characterizing the imaging properties of a soft X-ray optical system at its operational wavelength and its operational configuration. This optical test enables direct visual inspection of imaging aberrations and provides real-time feedback for the alignment of high resolution soft X-ray optical systems. A first application of this optical test was carried out on a Mo-Si multilayer-coated Schwarzschild objective as part of the MAXIMUM project. Results from the alignment procedure are presented as well as the possibility for testing in the hard X-ray regime.

引用

页码：364 / 371

页数：8

共 32 条

[1]

ABE H, 1992, APPL PHYS LETT, V63, P1040

[2] GENERAL DIFFRACTION THEORY OF OPTICAL ABERRATION TESTS, FROM POINT OF VIEW OF SPATIAL FILTERING [J].

BARAKAT, R .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1969, 59 (11) :1432-&

[3] REDUCTION IMAGING AT 14 NM USING MULTILAYER-COATED OPTICS - PRINTING OF FEATURES SMALLER THAN 0.1-MU-M [J].

BJORKHOLM, JE ;

BOKOR, J ;

EICHNER, L ;

FREEMAN, RR ;

GREGUS, J ;

JEWELL, TE ;

MANSFIELD, WM ;

MACDOWELL, AA ;

RAAB, EL ;

SILFVAST, WT ;

SZETO, LH ;

TENNANT, DM ;

WASKIEWICZ, WK ;

WHITE, DL ;

WINDT, DL ;

WOOD, OR ;

BRUNING, JH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06) :1509-1513

[4]

Born M., 1980, PRINCIPLES OPTICS, P511

[5]

BUCKLEY CJ, 1988, SPRINGER SERIES OPTI, V56, P146

[6] HIGH-RESOLUTION X-RAY MICROSCOPY USING AN UNDULATOR SOURCE, PHOTOELECTRON STUDIES WITH MAXIMUM [J].

CAPASSO, C ;

RAYCHAUDHURI, AK ;

NG, W ;

LIANG, S ;

COLE, RK ;

WALLACE, J ;

CERRINA, F ;

MARGARITONDO, G ;

UNDERWOOD, JH ;

KORTRIGHT, JB ;

PERERA, RCC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :1248-1253

[7] X-RAY PHASE LENS DESIGN AND FABRICATION [J].

CEGLIO, NM ;

HAWRYLUK, AM ;

SCHATTENBURG, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1285-1288

[8]

Foucault L, 1858, CR HEBD ACAD SCI, V47, P958

[9]

GRIEVENKAMP JE, 1978, OPTICAL SHOP TESTING

[10] VERIFICATION OF PARTIALLY COHERENT-LIGHT DIFFRACTION MODELS IN X-RAY-LITHOGRAPHY [J].

GUO, JZY ;

CERRINA, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3207-3213

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