LOW-LOSS SINGLE-MODE OPTICAL WAVE-GUIDES WITH LARGE CROSS-SECTION IN STANDARD EPITAXIAL SILICON

被引：27

作者：

SPLETT, A

PETERMANN, K

机构：

[1] Institut für Hochfrequenztechnik, Technische Universität Berlin, Berlin, Einsteinufer 25

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1994年 / 6卷 / 03期

关键词：

D O I：

10.1109/68.275507

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Single-mode waveguides, well matched to the fiber spot size, have been fabricated by chemical etching of standard epitaxial silicon. Analytical estimations for the waveguide attenuation are given. Measured waveguide losses below 1.5 dB/cm have been obtained at both wavelengths, lambda = 1.3 mum and lambda = 1.55 mum.

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页码：425 / 427

页数：3

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