EXPERIMENTAL INVESTIGATION OF THE ULTIMATE EELS SPATIAL-RESOLUTION

被引：24

作者：

MORY, C ^{[1
]}

KOHL, H ^{[1
]}

TENCE, M ^{[1
]}

COLLIEX, C ^{[1
]}

机构：

[1] TH DARMSTADT,INST ANGEW PHYS,W-6100 DARMSTADT,GERMANY

来源：

ULTRAMICROSCOPY | 1991年 / 37卷 / 1-4期

关键词：

D O I：

10.1016/0304-3991(91)90017-Z

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The spatial resolution of an inelastic scattering process, such as a core excitation, govems the ultimate spatial resolution of an EELS (electron energy loss spectroscopy) measurement. An experimental study of the attainable resolution has been made through a detailed analysis of the structure of energy-filtered images on a characteristic edge (uranium O45), as compared to the simultaneously recorded annular dark field images. When it has been possible to select specimen areas with a suitable random distribution of point objects (subnanometer uranium clusters), an upper limit of the degradation of the resolution is of the order of 0.3-0.4 nm for a 100 eV loss.

引用

页码：191 / 201

页数：11

共 23 条

[1]

Beaman DR., 1975, PHYSICAL ASPECTS ELE, P47

[2]

BONNET N, 1988, SCANNING MICROSCOP S, V2, P351

[3] PERFORMANCE OF ELECTRON SPECTROSCOPIES FROM THE POINT OF VIEW OF EELS AND AUGER MICROSCOPIES [J].