TEXTURE AND SOME PROPERTIES OF VAPOR-DEPOSITED DIAMOND FILMS

被引：67

作者：

SATO, Y

KAMO, M

机构：

[1] Natl Inst for Research in Inorganic, Materials, Japan

来源：

关键词：

18;

D O I：

10.1016/0257-8972(89)90053-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：183 / 198

页数：16

共 18 条

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[2] BERMAN R, 1965, PHYSICAL PROPERTIES, P384
[3] CLARK CD, 1979, PROPERTIES DIAMOND, P66
[4] DEVRIES RC, 1987, ANNU REV MATER SCI, V17, P161
[5] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
KAMO, M
SATO, Y
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[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644
[6] SYNTHESIS OF DIAMONDS BY USE OF MICROWAVE PLASMA CHEMICAL-VAPOR DEPOSITION - MORPHOLOGY AND GROWTH OF DIAMOND FILMS
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KAWATE, Y
HORIUCHI, T
[J]. PHYSICAL REVIEW B, 1988, 38 (06): : 4067 - 4084
[7] GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS
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SATO, Y
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SETAKA, N
[J]. JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) : 3106 - 3112
[8] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE
MATSUMOTO, S
SATO, Y
KAMO, M
SETAKA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04): : L183 - L185
[9] THERMAL-CONDUCTIVITY OF DIAMOND FILMS SYNTHESIZED BY MICROWAVE PLASMA CVD
ONO, A
BABA, T
FUNAMOTO, H
NISHIKAWA, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (10): : L808 - L810
[10] SATO Y, IN PRESS