DETERMINATION OF THE CENTROID DEPTHS OF SHALLOW IMPURITY PROFILES BY X-RAY-FLUORESCENCE SPECTROMETRY

被引:20
作者
GRIES, WH
WYBENGA, FT
机构
关键词
D O I
10.1002/sia.740030605
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:251 / 257
页数:7
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