共 11 条
[1]
REDUCTION AND ELIMINATION OF PROXIMITY EFFECTS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1993, 11 (06)
:2733-2740
[2]
GREENEICH JS, 1980, ELECTRON BEAM TECHNO, P69
[3]
Liu H., UNPUB
[4]
Mishra U. K., 1988, International Electron Devices Meeting. Technical Digest (IEEE Cat. No.88CH2528-8), P180, DOI 10.1109/IEDM.1988.32784
[6]
A THERMALLY ASSISTED FIELD-EMISSION ELECTRON-BEAM EXPOSURE SYSTEM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:2019-2022
[7]
NGUYEN L, 1993, IEEE MTT-S, P345, DOI 10.1109/MWSYM.1993.276807
[8]
ROHDIN H, 1995, SEVENTH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS, CONFERENCE PROCEEDINGS, P73, DOI 10.1109/ICIPRM.1995.522079
[9]
A NOVEL ELECTRON-BEAM EXPOSURE TECHNIQUE FOR 0.1-MU-M T-SHAPED GATE FABRICATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1990, 8 (06)
:1335-1338
[10]
Tiberio R. C., 1989, Proceedings of the SPIE - The International Society for Optical Engineering, V1089, P124, DOI 10.1117/12.968521