EMITTER BASE COLLECTOR SELF-ALIGNED HETEROJUNCTION BIPOLAR-TRANSISTORS USING WET ETCHING PROCESS

被引:10
作者
EDA, K
INADA, M
OTA, Y
NAKAGAWA, A
HIROSE, T
YANAGIHARA, M
机构
关键词
D O I
10.1109/EDL.1986.26523
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:694 / 696
页数:3
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