A STANDARD-TELEVISION COMPATIBLE 648 X 487 PIXEL SCHOTTKY-BARRIER INFRARED CCD IMAGE SENSOR

被引：9

作者：

KONUMA, K

TOHYAMA, S

TANABE, A

TERANISHI, N

MASUBUCHI, K

SAITO, T

MURAMATSU, T

机构：

[1] NIPPON AVION CO LTD,DIV SYST,SEYA KU,YOKOHAMA,KANAGAWA 246,JAPAN

[2] NEC CORP LTD,DIV GUIDANCE & ELECTROOPT,FUCHU,TOKYO 183,JAPAN

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1992年 / 39卷 / 07期

关键词：

D O I：

10.1109/16.141228

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a 648 x 487 pixel PtSi Schottky-barrier infrared CCD image sensor. Due to developing the Modified Inverted-LOCOS process which can minimize dead region, and the Two-Dopant Concentration Structure which achieves both large charge capability and high transfer efficiency, a 40% fill factor of 21 x 21-mu-m size pixel and 0.1-K N.E.T.D. were obtained.

引用

页码：1633 / 1637

页数：5

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