DEPENDENCE OF INELASTIC ELECTRON MEAN FREE PATHS ON ELECTRON-ENERGY AND MATERIAL

被引:13
作者
TANUMA, S [1 ]
POWELL, CJ [1 ]
PENN, DR [1 ]
机构
[1] NBS,GAITHERSBURG,MD 20899
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575629
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1041 / 1042
页数:2
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