HYDROGEN DIFFUSION IN POLYCRYSTALLINE SILICON THIN-FILMS

被引：74

作者：

JACKSON, WB

JOHNSON, NM

TSAI, CC

WU, IW

CHIANG, A

SMITH, D

机构：

[1] Xerox Palo Alto Research Center, Palo Alto, CA 94304

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 14期

关键词：

D O I：

10.1063/1.108446

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Grain boundaries in undoped polycrystalline silicon (poly-Si) thin films are shown to act as efficient hydrogen traps rather than as paths of enhanced diffusion. A comparison of hydrogen diffusion in poly-Si and undoped single-crystal silicon (c-Si) demonstrates that the diffusion in poly-Si is significantly suppressed compared to c-Si. These results have significant implications for hydrogenation of poly-Si thin-film transistors.

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收藏

页码：1670 / 1672

页数：3

相关论文

共 19 条

[1] ELECTRON-SPIN-RESONANCE STUDY OF HYDROGENATION EFFECTS IN POLYCRYSTALLINE SILICON [J].

BALLUTAUD, D ;

AUCOUTURIER, M ;

BABONNEAU, F .

APPLIED PHYSICS LETTERS, 1986, 49 (23) :1620-1622

[2] THERMAL BLEACHING OF X-RAY-INDUCED DEFECT CENTERS IN HIGH-PURITY FUSED-SILICA BY DIFFUSION OF RADIOLYTIC MOLECULAR-HYDROGEN [J].

GRISCOM, DL .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 68 (2-3) :301-325

[3]

GUPTA D, 1988, DIFFUSION PHENOMENA, pCH1

[4] DEUTERIUM PASSIVATION OF GRAIN-BOUNDARY DANGLING BONDS IN SILICON THIN-FILMS [J].

JOHNSON, NM ;

BIEGELSEN, DK ;

MOYER, MD .

APPLIED PHYSICS LETTERS, 1982, 40 (10) :882-884

[5]

JOHNSON NM, 1987, PHYS REV B, V35, P4166, DOI 10.1103/PhysRevB.35.4166

[6] MIGRATION OF THE H-2STAR COMPLEX AND ITS RELATION TO H- IN N-TYPE SILICON [J].

JOHNSON, NM ;

HERRING, C .

PHYSICAL REVIEW B, 1991, 43 (17) :14297-14300

[7]

JOHNSON NM, 1991, SEMICONDUCT SEMIMET, V34, pCH7

[8] HYDROGENATION OF TRANSISTORS FABRICATED IN POLYCRYSTALLINE-SILICON FILMS [J].

KAMINS, TI ;

MARCOUX .

ELECTRON DEVICE LETTERS, 1980, 1 (08) :159-161

[9] THE EXODIFFUSION OF HYDROGEN IN DISLOCATED CRYSTALLINE SILICON [J].

KVEDER, VV ;

LABUSCH, R ;

OSSIPYAN, YA .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 84 (01) :149-156

[10] DIFFUSION OF HYDROGEN AND DEUTERIUM IN FUSED QUARTZ [J].

LEE, RW ;

FRANK, RC ;

SWETS, DE .

JOURNAL OF CHEMICAL PHYSICS, 1962, 36 (04) :1062-&