BUFFER LAYER EFFECTS ON RESIDUAL-STRESS IN INP ON SI SUBSTRATES

被引:24
作者
SUGO, M
YAMAGUCHI, M
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D O I
10.1063/1.101281
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O59 [应用物理学];
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页码:1754 / 1756
页数:3
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共 8 条
[1]  
FENG ZC, 1983, J APPL PHYS, V54, P83, DOI 10.1063/1.331690
[2]   GAAS HETEROEPITAXIAL GROWTH ON SI FOR SOLAR-CELLS [J].
ITOH, Y ;
NISHIOKA, T ;
YAMAMOTO, A ;
YAMAGUCHI, M .
APPLIED PHYSICS LETTERS, 1988, 52 (19) :1617-1618
[3]  
RAZAGHI M, 1988, APPL PHYS LETT, V53, P725
[4]   GROWTH OF ANTIPHASE-DOMAIN-FREE GAP ON SI BY ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].
SUGO, M ;
YAMAMOTO, A ;
YAMAGUCHI, M .
JOURNAL OF CRYSTAL GROWTH, 1988, 88 (02) :229-235
[5]   RESIDUAL STRAINS IN HETEROEPITAXIAL III-V SEMICONDUCTOR-FILMS ON SI(100) SUBSTRATES [J].
SUGO, M ;
UCHIDA, N ;
YAMAMOTO, A ;
NISHIOKA, T ;
YAMAGUCHI, M .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (02) :591-595
[6]  
UCHIDA N, 1987, 19TH C SOL STAT DEV, P155
[7]   LOW THRESHOLD PULSED AND CONTINUOUS LASER OSCILLATION FROM ALGAAS/GAAS DOUBLE HETEROSTRUCTURES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION ON SI SUBSTRATES [J].
VANDERZIEL, JP ;
DUPUIS, RD ;
LOGAN, RA ;
MIKULYAK, RM ;
PINZONE, CJ ;
SAVAGE, A .
APPLIED PHYSICS LETTERS, 1987, 50 (08) :454-456
[8]  
YAMAMOTO A, 1986, OPTOELECTRONICS DEVI, V1, P41