GROWTH OF ANTIPHASE-DOMAIN-FREE GAP ON SI BY ORGANOMETALLIC VAPOR-PHASE EPITAXY

被引：22

作者：

SUGO, M

YAMAMOTO, A

YAMAGUCHI, M

机构：

[1] NTT, Electrical Communications Lab,, Tokai, Jpn, NTT, Electrical Communications Lab, Tokai, Jpn

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 88卷 / 02期

关键词：

D O I：

10.1016/0022-0248(88)90280-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：229 / 235

页数：7

共 11 条

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