KINETICS AND DYNAMICS ON SI(100)

被引:6
作者
HUANG, ZH
GRYKO, J
ALLEN, RE
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 02期
关键词
D O I
10.1116/1.585532
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The motion of Si atoms at a Si(100) surface is investigated on both short (approximately 1ps) and long (approximately 1 s) time scales. It is found that silicon atoms in the surface layer can form dimers within a time of order 1 ps. An interesting "switching" between symmetric and asymmetric dimers is observed in some runs. In others, the coexistence of symmetric and asymmetric dimers is observed. On a long time scale, stochastic modeling is used to simulate adsorption, diffusion, and growth. While deposition of Si atoms continues on vicinal Si(100), there is a tendency toward a one-domain surface with double steps. When deposition is turned off, diffusion leads to a two-domain surface with single steps. These conclusions are consistent with recent scanning tunneling microscopy and reflection high-energy electron diffraction observations.
引用
收藏
页码:685 / 689
页数:5
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