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TED PATTERN STUDIES OF STRUCTURE OF POST-ANNEALED AMORPHOUS SILICON LAYERS ON SINGLE-CRYSTAL SILICON

被引：9
作者：
OHDOMARI, I [1 ]
ONODA, N [1 ]
机构：
[1] WASEDA UNIV,SCH SCI & ENGN,SHINJUKU KU,TOKYO 160,JAPAN
来源：
PHILOSOPHICAL MAGAZINE | 1977年 / 35卷 / 05期
关键词：
D O I：
10.1080/14786437708232959
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1373 / 1380
页数：8
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