共 30 条
- [1] SPUTTERING OF MULTICOMPONENT METAL AND SEMICONDUCTOR TARGETS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 770 - 771
- [2] ANDERSEN HH, 1984, ION IMPLANTATION BEA, pCH6
- [3] BETZ G, 1984, SPUTTERING PARTICLE, V2, pCH2
- [4] Blaise G., 1978, Material Characterization Using Ion Beams. Lectures Presented at the NATO Advanced Study Institute on Material Characterization Using Ion Beams, P143
- [9] AN XPS STUDY OF THE INFLUENCE OF ION SPUTTERING ON BONDING IN THERMALLY GROWN SILICON DIOXIDE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (01): : 43 - 47
- [10] Hofmann S., 1983, MIKROCHIM ACTA S, V10, P135