共 11 条
[1]
CHANG CC, 1974, CHARACTERIZATION SOL, P509
[2]
JOSHI A, 1975, METHODS SURFACE ANAL, P159
[3]
PHYSICAL VAPOR-DEPOSITION OF THICK CR AND ITS CARBIDE AND NITRIDE FILMS BY HOLLOW-CATHODE DISCHARGE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1976, 13 (01)
:520-524
[4]
MATTOX DM, 1974, 6TH INT VAC C KYOT
[5]
NORDLANDER PJ, 1976, AUG INT S VAC THIN F
[6]
SPUTTERING - REVIEW OF SOME RECENT EXPERIMENTAL AND THEORETICAL ASPECTS
[J].
APPLIED PHYSICS,
1975, 8 (03)
:185-198
[7]
PALMBERG PW, 1972, HDB AUGER ELECTRON S
[9]
TAYLOR NJ, 1972, TECHNIQUES METALS RE, V7, P117
[10]
VARIAN, CMALEED CONSOLE FAST, P981