AUGER-ELECTRON SPECTROSCOPY AND ION SPUTTER PROFILES OF OXIDES ON ALUMINUM

被引：46

作者：

SMITH, T ^{[1
]}

机构：

[1] ROCKWELL INT,CTR SCI,THOUSAND OAKS,CA 91360

来源：

SURFACE SCIENCE | 1976年 / 55卷 / 02期

关键词：

D O I：

10.1016/0039-6028(76)90260-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：601 / 624

页数：24

共 11 条

[1] ELLIPSOMETRIC ANALYSIS OF AMORPHOUS OXIDE FILM GROWTH AND CRYSTALLINE OXIDE ISLAND DEVELOPMENT DURING THERMAL OXIDATION OF ALUMINUM
BADIA, M
[J]. THIN SOLID FILMS, 1972, 13 (02) : 329 - 333
[2] ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC MEASUREMENT OF REFRACTIVE INDEX OF A SURFACE
FENSTERMAKER, CA
MCCRACKIN, FL
[J]. SURFACE SCIENCE, 1969, 16 : 85 - +
[3] QUANTITATIVE COMPARISON OF TI AND TIO SURFACES USING AUGER-ELECTRON AND SOFT-X-RAY APPEARANCE POTENTIAL SPECTROSCOPIES
GRANT, JT
HAAS, TW
HOUSTON, JE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 227 - 230
[4] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
MCCRACKIN, FL
PASSAGLIA, E
STROMBERG, RR
STEINBERG, HL
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +
[5] MCCRACKIN FL, 1969, NBS479
[6] ELLIPSOMETRIC PARAMETERS OF ROUGH SURFACES AND OF A SYSTEM SUBSTRATE THIN FILM WITH ROUGH BOUNDARIES
OHLIDAL, I
LUKES, F
[J]. OPTICA ACTA, 1972, 19 (10): : 817 - &
[7] IDENTIFICATION OF AUGER SPECTRA FROM ALUMINUM
QUINTO, DT
ROBERTSON, WD
[J]. SURFACE SCIENCE, 1971, 27 (03) : 645 - +
[8] QUANTITATIVE AUGER ANALYSIS OF COPPER-NICKEL ALLOY SURFACES AFTER ARGON ION-BOMBARDMENT
SHIMIZU, H
ONO, M
NAKAYAMA, K
[J]. SURFACE SCIENCE, 1973, 36 (02) : 817 - 821
[9] OXIDATION OF TITANIUM BETWEEN 25 DEGREES C AND 400 DEGREES C
SMITH, T
[J]. SURFACE SCIENCE, 1973, 38 (02) : 292 - 312
[10] TAJIMA S, 1970, ADV CORROSION SCI TE, V1

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