ELLIPSOMETRIC ANALYSIS OF AMORPHOUS OXIDE FILM GROWTH AND CRYSTALLINE OXIDE ISLAND DEVELOPMENT DURING THERMAL OXIDATION OF ALUMINUM

被引：13

作者：

BADIA, M ^{[1
]}

机构：

[1] CTR RECH PECHINEY,VOREPPE 38,FRANCE

来源：

THIN SOLID FILMS | 1972年 / 13卷 / 02期

关键词：

D O I：

10.1016/0040-6090(72)90302-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：329 / 333

页数：5

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