OPTICAL AND ELECTRONIC-PROPERTIES OF AMORPHOUS DIAMOND

被引:74
作者
VEERASAMY, VS
AMARATUNGA, GAJ
MILNE, WI
HEWITT, P
FALLON, PJ
MCKENZIE, DR
DAVIS, CA
机构
[1] UNIV CAMBRIDGE,CAVENDISH LAB,CAMBRIDGE CB3 0HE,ENGLAND
[2] UNIV SYDNEY,SCH PHYS,SYDNEY,NSW 2006,AUSTRALIA
关键词
D O I
10.1016/0925-9635(93)90223-O
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The optical and electronic properties of highly tetrahedral amorphous diamond-like carbon (amorphous diamond, a-D) films were investigated. The structure of the films grown on silicon and glass substrates, under similar deposition conditions using a compact filtered cathodic vacuum arc system, are compared using electron energy loss spectroscopy (EELS). Results from hydrogenation of the films are also reported. The hydrogenated films show two prominent IR absorption peaks centred at 2920 and 2840 cm-1, which are assigned to the stretch mode of the C-H bond in the sp3 configuration on the C-H, and C-H sites respectively. The high loss EELS spectra show no reduction in the high sp3 content in the hydrogenated films. UV and visible transmission spectra of a-D thin films are also presented. The optical band gap of 2.0-2.2 eV for the a-D films is found to be consistent with the electronic bandgap. The relationship between the intrinsic compressive stress in the films and the refractive index is also presented. The space charge limited current flow is analysed and coupled with the optical absorption data to give an estimate of 10(18) cm-3 eV-1 for the valence band edge density of states.
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收藏
页码:782 / 787
页数:6
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