COMPOUND FORMATION BETWEEN AMORPHOUS-SILICON AND CHROMIUM

被引:7
作者
YACOBI, BG
SZADKOWSKI, AJ
ZUKOTYNSKI, S
CORBETT, JM
机构
[1] UNIV WATERLOO,DEPT PHYS,WATERLOO N2L 3G1,ONTARIO,CANADA
[2] UNIV TORONTO,DEPT ELECT ENGN,TORONTO M5S 1A4,ONTARIO,CANADA
关键词
D O I
10.1063/1.327592
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:6424 / 6425
页数:2
相关论文
共 5 条
[1]   GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J].
BOWER, RW ;
MAYER, JW .
APPLIED PHYSICS LETTERS, 1972, 20 (09) :359-&
[2]  
HERD SR, 1972, J NONCRYSTAL SOLIDS, V7, P309, DOI DOI 10.1016/0022-3093(72)90267-0
[3]   CONTACT REACTIONS BETWEEN AMORPHOUS SILICON AND SINGLE-CRYSTAL METALLIC-FILMS [J].
KOSTER, U ;
CAMPBELL, DR ;
TU, KN .
THIN SOLID FILMS, 1978, 53 (02) :129-134
[4]  
Poate J M, 1978, THIN FILMS INTERDIFF
[5]  
1978, THIN FILMS INTERDIFF, pCH10