RASTER SCANNING DEPTH PROFILING OF LAYER STRUCTURES

被引:74
作者
WITTMAACK, K [1 ]
机构
[1] GESELL STRAHLEN & UMWELT FORSCH MBH,ABT PHYS TECH,MUNICH,FED REP GER
来源
APPLIED PHYSICS | 1977年 / 12卷 / 02期
关键词
D O I
10.1007/BF00896140
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:149 / 156
页数:8
相关论文
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