3D HYDROGEN PROFILING BY ELASTIC RECOIL DETECTION ANALYSIS IN TRANSMISSION GEOMETRY

被引：18

作者：

TIRIRA, J

TROCELLIER, P

FRONTIER, JP

MASSIOT, P

COSTANTINI, JM

MORI, V

机构：

[1] CEA,DAM,PTN,F-91680 BRUYERES CHATEL,FRANCE

[2] CEA,CENS,INSTN,VANDEGRAAFF LAB,F-91191 GIF SUR YVETTE,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 50卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(90)90345-U

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An analytical procedure and a simulation-optimization algorithm are described for hydrogen determination based on elastic recoil detection induced by low-energy 4He ions (≤ 3 MeV) using transmission geometry. Hydrogen concentration depth profiles can be derived from the experimental recoil spectra for a depth range of up to 6 μm with a resolution better than 40 nm at the surface. The method is applied to thin polyimide films irradiated by high-energy heavy ions. The 3D hydrogen distribution is determined with a 4He+ mubeam. A high-hydrogen-concentration zone below the surface is shown. The hydrogen distribution is seen to evolve during the 4He+ irradiation. © 1990.

引用

收藏

页码：135 / 139

页数：5

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