MODELING RADIOFREQUENCY DISCHARGES - EFFECTS OF COLLISIONS UPON ION AND NEUTRAL PARTICLE ENERGY-DISTRIBUTIONS

被引:51
作者
MAY, PW [1 ]
FIELD, D [1 ]
KLEMPERER, DF [1 ]
机构
[1] UNIV BRISTOL,SCH ENVIRONM TOXICOL,CANTOCKS CLOSE,BRISTOL BS8 1TS,AVON,ENGLAND
关键词
D O I
10.1063/1.350882
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using a recently published description of the potentials in a radio-frequency discharge [Y. P. Song, D. Field, and D. F. Klemperer, J. Phys. D 23, 673 (1990)] Monte Carlo trajectories of ions and neutral particles for an Ar plasma have been computed, including collisions at the realistic pressures of tens of mTorr used for reactive ion etching. The model for collisions involves both charge exchange and momentum-transfer scattering. Ion and neutral energy and angular distributions have been calculated for particles impacting on the powered electrode and the calculations agree with an experimental ion energy distribution for Ar+. The presence of a large proportion of energetic neutrals is predicted, and it is suggested that these may have an important role to play in etch mechanisms.
引用
收藏
页码:3721 / 3730
页数:10
相关论文
共 30 条
[1]  
BRIAUD P, 1986, MATER RES SOC S P, V68, P109
[2]   POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING [J].
COBURN, JW ;
KAY, E .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :4965-4971
[4]   ION ENERGY-DISTRIBUTIONS IN RADIOFREQUENCY DISCHARGES [J].
FIELD, D ;
KLEMPERER, DF ;
MAY, PW ;
SONG, YP .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) :82-92
[5]  
HASTED JB, 1972, PHYSICS ATOMIC COLLI
[6]   ION AND ELECTRON-ENERGY ANALYSIS AT A SURFACE IN AN RF DISCHARGE [J].
INGRAM, SG ;
BRAITHWAITE, NSJ .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (10) :1496-1503
[7]  
Kauzmann W., 1966, KINETIC THEORY GASES
[8]   APPLICATION OF RF DISCHARGES TO SPUTTERING [J].
KOENIG, HR ;
MAISSEL, LI .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (02) :168-&
[9]  
KOHLER K, 1985, J APPL PHYS, V57, P59, DOI 10.1063/1.335396