RECENT ADVANCES OF ION-BEAM SYNTHESIS FOR SILICON-ON-INSULATOR STRUCTURES

被引：4

作者：

SKORUPA, W ^{[1
]}

GROTZSCHEL, R ^{[1
]}

BARTSCH, H ^{[1
]}

机构：

[1] ACAD SCI GDR,INST SOLID STATE PHYS & ELECTRON MICROSCOPY,DDR-4010 HALLE,GER DEM REP

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 112卷 / 02期

关键词：

D O I：

10.1002/pssa.2211120221

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：661 / 666

页数：6

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