A SPATIAL DAMAGE ENERGY-DISTRIBUTION CALCULATION FOR ION-IMPLANTED MATERIALS

被引：14

作者：

VIEU, C

CLAVERIE, A

FAURE, J

BEAUVILLAIN, J

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 02期

关键词：

D O I：

10.1016/0168-583X(89)90575-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：137 / 147

页数：11

共 48 条

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[10]

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