2-DIMENSIONAL COMPUTER-ANALYSIS OF LIQUID-PHASE EPITAXY

Two-dimensional computer analysis of LPE is performed to find the mechanism of edge growth. The edge height and nonuniformity factor are calculated as a function of time for various growth parameters. The calculations are compared with experiment and good agreement is found between them. Threemethods are recommended for minimizing edge growth. The first is to employ higher super-saturation and short growth time. The second is to set the area of the substrate as close as possible to that of the solution bottom. To realize the latter, it is necessary to use a substrate wider than the solutionbottom, and we suggest putting a weight on the solution to obviate the nonwetting region on the substrate in the corner of the slide boat well. The third is to choose a special shape of the solution well. It is concluded that edge growth is due to diffusion from the solution on the nongrowth region adjacent to the growth edge. © 1979 IOP Publishing Ltd.