ANOMALOUS CO-DIFFUSION EFFECTS OF GERMANIUM ON GROUP-III AND GROUP-V DOPANTS IN SILICON

被引：20

作者：

PFIESTER, JR

GRIFFIN, PB

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 06期

关键词：

D O I：

10.1063/1.99447

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：471 / 473

页数：3

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