SELECTIVE LOW-POWER PLASMA DECOMPOSITION OF SILANE-METHANE MIXTURES FOR THE PREPARATION OF METHYLATED AMORPHOUS-SILICON

被引：179

作者：

SOLOMON, I

SCHMIDT, MP

TRANQUOC, H

机构：

来源：

PHYSICAL REVIEW B | 1988年 / 38卷 / 14期

关键词：

D O I：

10.1103/PhysRevB.38.9895

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：9895 / 9901

页数：7

共 17 条

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[8] PHYSICS OF LOW DENSITY-OF-STATES A-SI1-XCX FILMS
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