INSITU INFRARED-ABSORPTION SPECTROSCOPY ON THE THERMAL-DECOMPOSITION PROCESS OF MOCVD SOURCE GASES FOR YBCO THIN-FILMS

被引：5

作者：

HANAOKA, K ^{[1
]}

OHNISHI, H ^{[1
]}

HARIMA, H ^{[1
]}

TACHIBANA, K ^{[1
]}

机构：

[1] MITSUBISHI ELECTR CO,MFG DEV LAB,AMAGASAKI,HYOGO 661,JAPAN

来源：

PHYSICA C | 1991年 / 190卷 / 1-2期

关键词：

D O I：

10.1016/S0921-4534(05)80231-X

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thermal decomposition of Cu(DPM)2 (bis(dipivaloylmethanato)copper (II)) in the gas phase was studied by in situ infrared spectroscopy combined with a MOCVD (metalorganic chemical vapor deposition) apparatus. Decomposition was observed above 500-degrees-C of substrate temperature at a reactor pressure of 20 Torr. Changes in the IR spectra when raising the substrate temperature show that the C-C-C (carbon chain) bond in the chelate-ring structure or the carbon-tertiary-butyl bond is first broken in the decomposition process.

引用

页码：145 / 147

页数：3

共 3 条

[1] SPECTROSCOPIC STUDY ON A DISCHARGE PLASMA OF MOCVD SOURCE GASES FOR HIGH-TC SUPERCONDUCTING FILMS [J].

HARIMA, H ;

OHNISHI, H ;

HANAOKA, K ;

TACHIBANA, K ;

KOBAYASHI, M ;

HOSHINOUCHI, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1990, 29 (10) :1932-1938

[2] AN IR STUDY ON THE STABILITY OF Y(DPM)3, BA(DPM)2 AND CU(CPM)2 FOR UV IRRADIATION [J].

HARIMA, H ;

OHNISHI, H ;

HANAOKA, K ;

TACHIBANA, K ;

GOTO, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (9A) :1946-1955

[3] PREPARATION AND CHARACTERIZATION OF SUPERCONDUCTING Y-BA-CU-O FILMS BY THE MOCVD TECHNIQUE [J].

OHNISHI, H ;

KUSAKABE, Y ;

KOBAYASHI, M ;

HOSHINOUCHI, S ;

HARIMA, H ;

TACHIBANA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (06) :1070-1075

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