RF BIASING THROUGH CAPACITIVE COLLECTOR TO TARGET COUPLING IN RF DIODE SPUTTERING

被引：12

作者：

CHRISTENSEN, O

JENSEN, P

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1972年 / 5卷 / 01期

关键词：

D O I：

10.1088/0022-3735/5/1/029

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：86 / +

页数：1

共 9 条

[1]

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[2]

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[6] ELECTRICAL CHARACTERIZATION OF RADIO-FREQUENCY SPUTTERING GAS DISCHARGE [J].

LOGAN, JS ;

MAZZA, NM ;

DAVIDSE, PD .

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[7]

SWIFT JD, 1970, ELECTRICAL PROBES PL

[8]

VOSSEN JL, 1968, RCA REV, V29, P566

[9] GAS INCORPORATION INTO SPUTTERED FILMS [J].

WINTERS, HF ;

KAY, E .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (10) :3928-&

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